Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d68514a32e3a53b7a0c77aabb87304b8 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C321-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D285-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C323-18 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C319-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D285-00 |
filingDate |
2007-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2008-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a55e69d93b6d7bafa47f34e092a02a4a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fd8cec96b9626efc951ba78e38a1eee |
publicationDate |
2008-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-7396960-B2 |
titleOfInvention |
Sulfonium salts |
abstract |
The present invention provides a sulfonium salt which can serve as a photo-acid-generator, the sulfonium salt not raising the problem of poor compatibility to a photoresist polymer having an acid-dissociable group. The sulfonium salt is represented by formula (1): n nwherein R 1 represents a linear or branched C2 to C9 divalent hydrocarbon group; each of R 2 to R 5 represents a hydrogen atom or a linear or branched C1 to C3 hydrocarbon group; each of R 6 and R 7 represents an organic group; R 6 and R 7 may be linked together to form a divalent organic group; and X − represents an anion. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9012129-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010297560-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8808959-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010119974-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8703383-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018284610-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2455812-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10514600-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8298748-B2 |
priorityDate |
2006-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |