| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cb86618c68beecc5f7abba60d2f5db4e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a1165fb95b91f8b3aad81c04856c1acf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-56 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-316 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-56 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K11-02 |
| filingDate |
2003-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00adce73fb2ca34956c5f98f8b09c8d1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85f34d88f37b57b74701e2a3131b768d |
| publicationDate |
2008-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7393469-B2 |
| titleOfInvention |
High performance sol-gel spin-on glass materials |
| abstract |
Hybrid sol-gel materials are provided, which may be produced by the reaction of an alkyl or dialkyl substituted trialkoxysilane or dialkoxysilane reacting with a silane diol, wherein said alkyl group has from 1 to 8 carbon atoms. A process is also provided for patterning the sol-gel spin-on glass material by: a) coating a substrate with the spin-on glass material; b) exposing the coated substrate of step a) to UV illumination in a desired pattern; c) post-exposure baking the coated substrate of step b) at a temperature from 100° C. to 120° C. for 30 to 60 minutes; d) cooling the coated substrate of step c) to room temperature; e) removing the non-exposed areas of the coating on the coated substrate of step d); f) drying the coated substrate of step e); g) hard baking the coated substrate of step f) at a temperature from 120° C. and 150° C. for 1 to 3 hours. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9070838-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10175584-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9046796-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8149381-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009214848-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005225738-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011128514-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006209285-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006203218-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012313082-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7988778-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010147192-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006291060-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007030468-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8767173-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8208123-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100980270-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014076373-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015184066-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10450221-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8189170-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009103070-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7993008-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7876418-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005094119-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7697111-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10083774-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101251553-B1 |
| priorityDate |
2003-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |