| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3c754156d9ab873a2efe5a3990dbf627 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66765
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-458 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-84 |
| filingDate |
2006-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02fecf56afc897c936318fbafe9173b9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48827066209e51f0b37558551cb2ea8e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b51f725b4207618bb9b8fdabdd423f42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c0386f9ac0e375097ce532a016ed581 |
| publicationDate |
2008-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7378303-B2 |
| titleOfInvention |
Method of fabricating thin film transistor |
| abstract |
A method for fabricating a thin film transistor is provided. A conductive layer is formed on a substrate. A patterned mask is formed on the conductive layer to cover a predetermined thin film transistor (TFT) area, and at least one portion of the conductive layer exposed by the patterned mask are removed. A laser is applied to form a laser hole in the patterned mask to expose a portion of the conductive layer and the laser hole substantially corresponds to a channel region of the predetermined TFT area. The exposed conductive layer is etched to form source and drain electrodes on opposite sides of the channel region. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011210331-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008176398-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8304281-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8420978-B2 |
| priorityDate |
2006-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |