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filingDate 2003-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationNumber US-7364622-B2
titleOfInvention Method and apparatus for fabricating a device, and the device and an electronic equipment
abstract The invention provides an apparatus for fabricating a device, in which a high operation efficiency is maintained in a drying treatment for a multilayer-interconnection device. The device can also be fabricated inexpensively. An apparatus for fabricating a device has an inkjet unit that can dispose a liquid material on a substrate, and a preparatory dryer to blow a gas heated at a predetermined temperature to the substrate.
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