| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0955
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0911 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B19-0052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02488
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0961
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0966
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78627
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02675
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02672
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1296
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B19-0014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1277
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02691
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02686 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-09 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-13 |
| filingDate |
2006-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7dec4d1ff9bbf4d655bc09a747cbae06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21747acfb77b0d181ab4dff0d66658d4 |
| publicationDate |
2008-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7362784-B2 |
| titleOfInvention |
Laser irradiation method, laser irradiation apparatus, and semiconductor device |
| abstract |
An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of the pulse emission. At a laser crystallization step of irradiating a semiconductor film with a laser light, a continuous light emission excimer laser emission device is used as a laser light source. For example, in a method of fabricating an active matrix type liquid crystal display device, a continuous light emission excimer laser beam is irradiated to a semiconductor film, which is processed to be a linear shape, while scanning in a vertical direction to the linear direction. Therefore, more uniform crystallization can be performed because irradiation marks can be avoided by a conventional pulse laser. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8767782-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8003499-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7713831-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005127051-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7521650-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7868267-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003024905-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007099401-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008081430-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007017907-A1 |
| priorityDate |
1999-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |