| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76232 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-00 |
| filingDate |
2004-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5efcc27338ef496bed6d8dfd6d34c34e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_457e30c3e8e8359f9dc6e7423366c6e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2e84644e07441f36665c775c2acb1f7 |
| publicationDate |
2008-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7339253-B2 |
| titleOfInvention |
Retrograde trench isolation structures |
| abstract |
Methods are provided for making retrograde trench isolation structures with improved electrical insulation properties. One method comprises the steps of: forming a retrograde trench in a silicon substrate, and forming a layer of silicon oxide on the walls of the trench by thermal oxidation, such that the trench is sealed and a space is formed within the layer of silicon oxide. The space can contain a vacuum or any of a variety of gases depending upon conditions of the thermal oxidation step. Retrograde trench isolation structures containing a space are also provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9202864-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9059203-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8610211-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10224396-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8120094-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009045482-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008023755-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11226506-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8409964-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012018806-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7566645-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021294130-A1 |
| priorityDate |
2004-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |