| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E01F9-65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E01F9-61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E01F9-673 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-76 |
| filingDate |
2004-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b4f3f4b93b7792c9a648cba92468a1e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f19b611fef8c830266c1089c37fcf7a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f76ffb3198a7035e3650caf074788c82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aeb4a733f07318fcb9d53dd0e6e47619 |
| publicationDate |
2008-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7335455-B2 |
| titleOfInvention |
Method of forming an underlayer of a bi-layer resist film and method of fabricating a semiconductor device using the same |
| abstract |
A method of forming an underlayer of a bi-layer resist including forming a blended material by blending a polymer having an aromatic group and a methacrylate polymer, and coating a substrate with the blended material. The blended material coated on the substrate is irradiated to form an underlayer. The polymer having the aromatic group may be a novolac polymer or a naphthalene polymer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010285407-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9804493-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8697330-B2 |
| priorityDate |
2003-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |