patent/US-7330279-B2

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7330279-B2

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_324027858f407d939e646def301b5b35
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70616 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-705 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-00
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F- http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01V8-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
filingDate	2002-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2008-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f405d055cc65a595f04cfdc352e59ee3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa101356184dd886f3cad20ec231237f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff9bc2dc746d650da2aff67aae98aa03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88cd9b4a1a5fc0253913e5280173e340 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27beb54e27909520de1c2cfae825e7d3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9141af4da78747477bb8b1758acd2fc1
publicationDate	2008-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-7330279-B2
titleOfInvention	Model and parameter selection for optical metrology
abstract	A profile model for use in optical metrology of structures in a wafer is selected, the profile model having a set of geometric parameters associated with the dimensions of the structure. A set of optimization parameters is selected for the profile model using one or more input diffraction signals and one or more parameter selection criteria. The selected profile model and the set of optimization parameters are tested against one or more termination criteria. The process of selecting a profile model, selecting a set of optimization parameters, and testing the selected profile model and set of optimization parameters is performed until the one or more termination criteria are met.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8069020-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008115140-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8183062-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8798966-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7571074-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008170780-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10656634-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010161099-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010209830-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7912679-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7505153-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9519285-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009063075-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008007740-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007057732-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10354929-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014293295-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009083013-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008027565-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10126659-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008285054-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7495781-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10671923-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7496865-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11480868-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010214545-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7451054-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009076782-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7916927-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008195342-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006046166-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7428060-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7765076-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9977340-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007223011-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007091325-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008151269-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8893060-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008252908-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013304408-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7567352-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9279665-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8024676-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150018806-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10146036-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9904993-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11619877-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012117522-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7729873-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014079312-A9 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7742888-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9619603-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8760649-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008183413-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008183411-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8612045-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7616325-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7566181-B2
priorityDate	2002-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6900892-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6748104-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004017575-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005209816-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6943900-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6609086-B1
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3017 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226407543

Total number of triples: 105.