| abstract |
A photosensitive composition, comprises (A) a sulfonium salt represented by formula (I); n nwherein Y 1 , Y 2 and Y 3 each independently represents a nitrogen-containing heteroaryl group, an alkyl group, a cycloalkyl group, an aryl group or an alkenyl group, at least one of Y 1 , Y 2 and Y 3 represents a nitrogen-containing heteroaryl group, and at least two of Y 1 , Y 2 and Y 3 may combine with each other to form a ring; X n− represents an n-valent non-nucleophilic anion; and n represents an integer of 1 to 3. |