| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-65 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2005-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25afd567a73dc4ee07d3f631180905e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09257fbb94f768492cf1f43b6a8abeee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd48bab1b7d9e12bedf93f2993f244e2 |
| publicationDate |
2008-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7316961-B2 |
| titleOfInvention |
Method of manufacturing semiconductor device |
| abstract |
Provided is a method of manufacturing a semiconductor device with enhancements of electrical characteristics. The method includes sequentially forming a lower electrode and an insulating layer on a semiconductor substrate, dry-etching a region of the insulating layer corresponding to a capacitor forming region so that the lower electrode is not exposed, forming an inter-insulating layer by wet-etching the insulating layer so that a region of the lower electrode corresponding to the capacitor forming region is exposed, and sequentially forming a dielectric layer and an upper electrode on the capacitor forming region to fabricate a capacitor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009290410-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8623692-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8120947-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8213220-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010118603-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012149144-A1 |
| priorityDate |
2004-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |