| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e85662883ee11f4790be9874238ffa65 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-215
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-213 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-211 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J4-00 |
| filingDate |
2006-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0f815bce655de5808e638e361b66e36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fd67d44bbcc9e4fd3e5ff40c6cf902b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dd6756d95c4ffca1b2a3eefbb931b72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7c54f33fbe782ba66e818673f5c1b6f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_202733b8af070771725f0458ff63aa3a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_218994dc98997c0f0a5e9dccf5d7a802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d8c7eda4ae0a6a557c0f8f997c1bcd0 |
| publicationDate |
2007-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7304737-B1 |
| titleOfInvention |
Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence |
| abstract |
Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation, including a system of mirrors and refractive elements for correcting aberation while directing a beam of electromagnetic radiation to a spot on a sample at a multiple different angles-of-incidence. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8064055-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009207408-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10061068-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8983787-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7965390-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8125641-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9921352-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8638437-B2 |
| priorityDate |
1995-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |