Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_717c792fca7cc9c290c9db33e8fe078b |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F232-08 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F232-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-835 |
filingDate |
2006-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2007-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f046ea04a169bcbadb1cf12391b837f9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c815b5613c6bbeb0dae39d5bc15cb1ea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11f5db98e7b70cd3838e72b559eb31d2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8302fff725590a601ad8598b1129bfb6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09c2f05e3cac39441d1abb644fd7b8a6 |
publicationDate |
2007-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-7291689-B1 |
titleOfInvention |
Thermally stable low dielectric norbornene polymers with improved solubility and adhesion property |
abstract |
The present invention provides norbornene-based copolymers for which one monomer is at least selected from a group consisting of norbornene and dicyclopentadiene, and the other from norbornene-based comonomers of Formula 1 shown below: n n n n n n n n n n n In Formula 1, R 1 , R 2 and a are defined in this specification. n The present invention provides insulating elements for multi-chip packages and antireflection films for the exposure process of semiconductor fabrication using said norbornene-based copolymers. Norbornene-based copolymers according to the present invention have low dielectric constant as well as high thermal stability and excellent solubility to various organic solvents. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11059938-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10179833-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10844164-B2 |
priorityDate |
2006-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |