| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-0081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R23-16 |
| filingDate |
2006-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a5d1a555c3332ec2021f0f68a421870
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e743ca7dc2c899916f65713022806219
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21ad638278b5728dfd341dc6a82b82aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6e8275c42ee30c35333269ddace4740 |
| publicationDate |
2007-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7286948-B1 |
| titleOfInvention |
Method for determining plasma characteristics |
| abstract |
Methods for determining characteristics of a plasma are provided. In one embodiment, a method for determining characteristics of a plasma includes obtaining metrics of current and voltage information for first and second waveforms coupled to a plasma at different frequencies, determining at least one characteristic of the plasma using the metrics obtained from each different frequency waveform. In another embodiment, the method includes providing a plasma impedance model of a plasma as a function of frequency, and determining at least one characteristic of a plasma using model. In yet another embodiment, the method includes providing a plasma impedance model of a plasma as a function of frequency, measuring current and voltage for waveforms coupled to the plasma and having at least two different frequencies, and determining ion mass of a plasma from model and the measured current and voltage of the waveforms. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107086178-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9275916-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014327003-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107086178-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113657593-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8334657-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10536130-B2 |
| priorityDate |
2006-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |