| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d9f3ca41550d315642580237250c5b0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0683 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B5-02 |
| filingDate |
2005-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd792dfab9ac244c26927e878c3760c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ab4e55084e5e43ad43091468bf5910f |
| publicationDate |
2007-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7277819-B2 |
| titleOfInvention |
Measuring layer thickness or composition changes |
| abstract |
A method of measuring the thickness or the rate of change of thickness of a layer as the layer is being formed on a substrate, includes illuminating the layer through the substrate with low coherence light that transmits through the layer; collecting a portion of the reflected light from each optical interface of the substrate and layer with a low coherence interferometer; and, calculating the thickness or the rate of change of thickness of the layer according to the obtained interferometric data. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7680373-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007260422-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8437587-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7738762-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009177042-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8305432-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8411922-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8212884-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9639934-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9066651-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7424389-B2 |
| priorityDate |
2005-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |