| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_496e3f7537b43a3a3ecb2dbe8b7774a8 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45502
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45578
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2003-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70608e4b48523593b2f212c97fcb0eab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6dee72a0f1faf251ad1ad1d3f12a4cac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e36f3ae8bef3c7685375ee82c669eaaf |
| publicationDate |
2007-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7264849-B2 |
| titleOfInvention |
Roll-vortex plasma chemical vapor deposition method |
| abstract |
A chemical vapor deposition method includes a step of maintaining a hydrogen plasma at low pressure in a processing chamber. The processing chamber has a long, wide, thin geometry to favor deposition of thin-film silicon on sheet substrates over the chamber walls. The sheet substrates are moved through between ends. A pair of opposing radio frequency electrodes above and below the workpieces are electrically driven hard to generate a flat, pancaked plasma cloud in the middle spaces of the processing chamber. A collinear series of gas injector jets pointed slightly up on a silane-jet manifold introduce 100% silane gas at high velocity from the side in order to roll the plasma cloud in a coaxial vortex. A second such silane-jet manifold is placed on the opposite side and pointed slightly down to further help roll the plasma and maintain a narrow band of silane concentration. A silane-concentration monitor observes the relative amplitudes of the spectral signatures of the silane and the hydrogen constituents in the roll-vortex plasma and outputs a process control feedback signal that is used to keep the silane in hydrogen concentration at about 6-7%. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8771499-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9443702-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107078049-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011006040-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10526708-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10537840-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9611556-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9359674-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009238972-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009120686-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009082517-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9299956-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10049859-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9096932-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9096933-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8697197-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009004363-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008139003-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011005681-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8268136-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011005682-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009017206-A1 |
| priorityDate |
2003-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |