http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7238912-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bf5eafa2bfc20f349c606cd4b21e643c
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-065
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-06
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L-
filingDate 2004-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2007-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a02ae52d11727cb55a9f3368fc59e6d
publicationDate 2007-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7238912-B2
titleOfInvention Wafer characteristics via reflectometry and wafer processing apparatus and method
abstract An exemplary system includes a measuring device to acquire non-contact thickness measurements of a wafer and a laser beam to cut the wafer at a rate based at least in part on one or more thicknesses measurements. An exemplary method includes illuminating a substrate with radiation, measuring at least some radiation reflected from the substrate, determining one or more cutting parameters based at least in part on the measured radiation and cutting the substrate using the one or more cutting parameters. Various other exemplary methods, devices, systems, etc., are also disclosed.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10442034-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8796160-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10480935-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012108882-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011003485-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9234843-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015343560-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8780343-B2
priorityDate 2003-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004150820-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6376797-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06120334-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002039186-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002167326-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5486701-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6275295-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5517315-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004226926-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID94407
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415794430

Total number of triples: 41.