| abstract |
A coating composition primarily comprising a disilane compound of the formula (A):n nX m R 1 3−m Si—Y—SiR 1 3−m X m (A)n nwherein R 1 is a monovalent hydrocarbon group, Y is a divalent fluorinated organo group, X is a hydrolyzable group, and m is 1, 2 or 3, or a (partial) hydrolyzate thereof is applied and cured to form a protective coat having excellent chemical resistance and antireflection. |