| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_94b59679f6977a0882adb7bde9b9871c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S414-141
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S414-139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S414-138 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67201
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67167 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2003-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00fefa1400d3860f6c2109d5aab41d70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17ee6a35407396ef094f246d1d415471 |
| publicationDate |
2007-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7226512-B2 |
| titleOfInvention |
Load lock system for supercritical fluid cleaning |
| abstract |
A substrate is transferred from an environment at about vacuum into a load lock through a first door. The substrate is then sealed within the load lock. The pressure within the load lock is raised to a high pressure above vacuum. A second door coupling the load lock to a high-pressure processing chamber is then opened and the substrate moved from the load lock into the high-pressure chamber. The substrate is then sealed within the high-pressure chamber. High-pressure processing, such as high pressure cleaning or high pressure deposition, is then performed on the substrate within the high-pressure chamber. Subsequently, the second door is opened and the substrate transferred into the load lock. The substrate is then sealed within the load lock. The pressure within the load lock is lowered to about vacuum and the first door opened. The substrate is then removed from the load lock into the environment. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008101893-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9751698-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007246074-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9771223-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010189532-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013309046-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7592267-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017252991-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007120222-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012266810-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008303397-A1 |
| priorityDate |
2003-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |