| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a0f26a9c2efad3ae086a108f3c04b57d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-3011 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5227
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2003-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d7d80f570d148843da5dd28c9e4a39f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3bf6a571adabacfe44bd8af2165c3dc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50089b2010b967f98fcc02645a4b3316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bfb67d4f38a1b7411e2526348cd6c0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d10e747ce61b06c4fb2e64203b868ba |
| publicationDate |
2007-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7223680-B1 |
| titleOfInvention |
Method of forming a dual damascene metal trace with reduced RF impedance resulting from the skin effect |
| abstract |
The RF impedance of a metal trace at gigahertz frequencies is reduced by forming the metal trace to have a base region and a number of fingers that extend away from the base region. When formed to have a number of loops, the metal trace forms an inductor with an increased Q. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8004061-B1 |
| priorityDate |
2002-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |