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publicationNumber US-7215424-B1
titleOfInvention Broadband ellipsometer or polarimeter system including at least one multiple element lens
abstract Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a tubular mounting fixture, and the application thereof in focusing, (and optionally re-colliminating), a spectroscopic electromagnetic beam into a very small, chromatically relatively undispersed, area spot on a material system.
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