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publicationDate 2007-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7212019-B2
titleOfInvention Probe needle for testing semiconductor chips and method for producing said probe needle
abstract A probe needle for testing semiconductor chips includes one end that is fixed in a holding element and a free end that includes a contact tip. The probe needle is provided—at least on the surface of the contact tip—with a layer consisting of a chemically inert, electroconductive material which is hard in relation to the material of contact surfaces of the semiconductor chips. For example, the layer can be titanium nitride.
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