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filingDate 2003-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2007-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7205675-B2
titleOfInvention Micro-fabricated device with thermoelectric device and method of making
abstract A micro-fabricated device, includes a support structure having an aperture formed therein, and a device substrate disposed within the aperture. The micro-fabricated device further includes a thermally isolating structure thermally coupling the device substrate to the support structure. The thermally isolating structure includes at least one n-doped region and at least one p-doped region formed on or in the thermally isolating structure and separated from each other. In addition, the thermally isolating structure includes an electrical interconnect connecting at least one n-doped region and at least one p-doped region, forming an integrated thermoelectric device.
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