| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1bddc4f8d1cb2c68028a0c1104d7fb03 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2201-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2002-14491
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2002-14419 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-14427
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1626
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1635
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1648
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04543
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1646
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04571
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04588
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04585
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04591
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04596
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01D15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-08 |
| filingDate |
2005-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ade433e780794e4875487d9606cec679 |
| publicationDate |
2007-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7189334-B2 |
| titleOfInvention |
Printhead fabrication method |
| abstract |
A method of fabricating a plurality of nozzle arrangements for an inkjet printhead chip includes fabricating drive circuitry layers on a substrate with a CMOS fabrication process; depositing a first sacrificial layer on the substrate; depositing a heater layer for forming one or more heating circuits on the first sacrificial layer and etching the heater layer to form the heating circuits; depositing a resiliently flexible layer of dielectric material on the substrate to cover the heater layer and etching the dielectric layer to form one or more actuators and one or more ink ejection members; depositing a second sacrificial layer on the substrate to cover the actuators and the ink ejection members and etching the sacrificial layer to define deposition zones for one or more nozzle chamber walls and one or more roof walls; depositing a layer of a structural material on the second sacrificial layer to form the nozzle chamber walls and the roof walls; and etching away the sacrificial layers. |
| priorityDate |
1998-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |