| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_27562ace359200dce7274340b5c7c28b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8825 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-95607
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-95623 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88 |
| filingDate |
2004-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a292362fe960fc9a485ae89c86fad2ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8544ca34ccf7c6281e5f7dfc30c26459
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00df967b2306713fe37cb3854655879b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fb7696cbb2a7f3efd35de2fc40e2f85 |
| publicationDate |
2007-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7164475-B2 |
| titleOfInvention |
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques |
| abstract |
The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens. A brightfield beamsplitter in the system is removable, and preferably replaced with a blank when performing darkfield illumination. Light level control for the system is provided by a dual polarizer first stage. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10488176-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8264662-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7782452-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8564767-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008030731-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008309892-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009122304-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009116727-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8620063-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7508504-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7522275-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009059215-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7586607-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007247622-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007258085-A1 |
| priorityDate |
1995-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |