http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7157925-B2

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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34
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filingDate 2004-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2007-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8e73decae180232a0dfc1bfe737f157
publicationDate 2007-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7157925-B2
titleOfInvention Test structure for speeding a stress-induced voiding test and method of using same
abstract A test structure, having: a first member having: a roughly a rectangular shape; a first width dimension; and a first length dimension that is greater than the first width dimension; and a second member having: a roughly a rectangular shape; a second width dimension; and a second length dimension that is greater than the second width dimension combined with the first member to form a roughly symmetrical cross-shaped test structure. Also a method of using the test structure to test for voids.
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priorityDate 2004-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 24.