| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24917 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B5-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-14 |
| filingDate |
2003-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b0901d0e3691919c60d808f772cd74c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca07554034ef0fc85a4614170470d056 |
| publicationDate |
2006-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7153615-B2 |
| titleOfInvention |
Extreme ultraviolet pellicle using a thin film and supportive mesh |
| abstract |
An extreme ultraviolet (EUV) pellicle including a thin film or membrane and a supportive wire mesh. The pellicle allows EUV radiation to pass through the pellicle to a reticle but prevents particles from passing through the pellicle. A buffer gas supports the film against the wire mesh. The film or membrane may be embedded with support fibers or beams. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008158535-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9519220-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010304283-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7767985-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150119148-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008113491-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7723704-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010541267-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7666555-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10221581-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8029950-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9182686-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008152873-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010136281-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102008041436-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7838851-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10254655-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010096569-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9057957-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9075321-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9664999-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010195076-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008020301-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005042153-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8524092-B2 |
| priorityDate |
2003-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |