| abstract |
A multifunction sensor based on a bulk acoustic wave (BAW) device can be used to obtain measurements of a liquid's corrosivity, viscosity, and conductance. A front electrode and a back electrode can be used to excite vibrations in a piezoelectric substrate. Vibrations in the piezoelectric substrate cause an electrical signal that can be measured as a voltage differential between the front and back electrodes. The signal amplitude is an indication of the liquid's viscosity. The signal frequency is an indication of corrosivity because corrosion can change the sensor's fundamental frequency over time. A third electrode, a runner, can be placed near the front electrode. A voltage difference between the runner and the front electrode can cause a current to flow between them and through the liquid. The voltage difference and the current indicate the liquid's conductivity. |