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publicationDate 2006-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7144453-B2
titleOfInvention Composition for preparing porous dielectric thin film containing saccharides porogen
abstract A composition for preparing a porous interlayer dielectric thin film which includes a saccharide or saccharide derivative, a thermo-stable organic or inorganic matrix precursor, and a solvent for dissolving the two solid components. Also provided is a dielectric thin film having evenly distributed nano-pores with a diameter of less than 50 Å, which is required for semiconductor devices.
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