| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-86847
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-87812 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K11-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K31-0624
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K51-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K31-0631 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K11-044 |
| filingDate |
2004-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2397b654164ad8a0cc445ea2801161b5 |
| publicationDate |
2006-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7140393-B2 |
| titleOfInvention |
Non-contact shuttle valve for flow diversion in high pressure systems |
| abstract |
A valve for redirecting flow in a supercritical fluid or other high pressure processing system is disclosed. In high pressure supercritical carbon dioxide (SCCO2) equipment for semiconductor wafer processing, a major hurtle in providing clean equipment and clean wafers. A clean flow diverting valve is provided having no grease or other contaminants, and having no rubbing seal surfaces, but rather incorporates a magnetically coupled valve actuator to move a ball or other valve seat for diverting flow between a common port and alternative switched ports in a non-rubbing, non-contact manner. The valve is useful in semiconductor wafer high pressure processing tools for redirecting flow from a common inlet to alternative outlets or for admitting flow from alternative inlets to a common outlet. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7591613-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009260331-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007221252-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10679872-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018012777-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10571041-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017057805-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7694498-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7866058-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10096497-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8096064-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008267721-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013319484-A1 |
| priorityDate |
2004-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |