| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60e21de07fa18fc54e2150daffc14654 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-4913
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49117 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06V40-1306 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06K9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-06 |
| filingDate |
2002-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa464568533827359f69f6252915b30f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33f98e3d0cfeebeae7901da9f4b9abaa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a027038a6fe72d2a7cb599a0c10a9040
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68925b154d9a7b52552c4b06fd7161c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02fe58f664feba0fdac6ac31c4381877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a121eb4954fe9531cc4147cf5ff15365
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfb8c3421a17a0410eeb59fe67d2a9dc |
| publicationDate |
2006-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7123026-B2 |
| titleOfInvention |
Surface shape recognition sensor and method of manufacturing the same |
| abstract |
A surface shape recognition sensor includes capacitive detection elements, support electrode, protective film, and projections. The detection elements are formed from lower electrodes and a deformable plate-like upper electrode made of a metal. The lower electrodes are insulated and isolated from each other and stationarily laid out on a single plane of an interlevel dielectric formed on a semiconductor substrate. The upper electrode is laid out above the lower electrodes at a predetermined interval and has opening portions. The support electrode is laid out around the lower electrodes while being insulated and isolated from the lower electrodes, and formed to be higher than the lower electrodes to support the upper electrode. The protective film is formed on the upper electrode to close the opening portions. The projections per one pixel are laid out in a region of the protective film above the capacitive detection element. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7884624-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010107770-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7606399-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007145003-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008056543-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008202251-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008086860-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008150554-A1 |
| priorityDate |
2001-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |