| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-50 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-08 |
| filingDate |
2003-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b2fdecf7cdc5a3f32c8db8f348405d9 |
| publicationDate |
2006-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7101443-B2 |
| titleOfInvention |
Supercritical carbon dioxide-based cleaning of metal lines |
| abstract |
Supercritical carbon dioxide may be utilized to clean metal lines (e.g. copper, cobalt). The supercritical carbon dioxide cleans may include hydrogen gas in one embodiment, hydrofluoric acid in another embodiment, and hexafluoroacetyl acetone as a metal-binding ligand in another embodiment. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008153282-A1 |
| priorityDate |
2003-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |