| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cf213be03285a0b93967ae2fd2fd351a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2068 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate |
2003-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1e0dd2c2ff0ee0fe4ca672da0f46864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59ca0335c0242add67a61803b47a21bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1349a15ef54759a100aa315c10dfa9e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78bca85ebca82f3b06b2dd2bb1ad0867
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c44e1e4bf3b4a74a58f6cb5127abf19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_555a642c893e3c3d6496af8303ffa0a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31f81867ffc45554697f353b5986d844 |
| publicationDate |
2006-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7091165-B2 |
| titleOfInvention |
Composition and method for removing copper-compatible resist |
| abstract |
A composition for removing a copper-compatible resist includes: about 0.1% to about 10% by weight of an alkylbenzenesulfonic compound; about 10% to about 99% by weight of a glycolether compound; and about 0.5% to about 5% by weight of a corrosion inhibitor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9029268-B2 |
| priorityDate |
2002-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |