| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-0056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2003-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be2c1952c8adf91e551286146c61dfe9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9de007165de5df3dd07bb7b217462de1 |
| publicationDate |
2006-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7084059-B2 |
| titleOfInvention |
CMP system for metal deposition |
| abstract |
A system for dished metal redevelopment by providing a metal deposition solution at an interface between a moving semiconductor wafer and a moving polishing pad, which deposits metal onto dished metal in trenches in a layer of an interlayer dielectric; and by polishing the wafer with a relatively reduced polishing pressure to polish metal being deposited. A polishing fluid is disclosed for use in a CMP polishing system, the polishing fluid being a metal deposition solution for dished metal redevelopment. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7795150-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008102631-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8546016-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012178257-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006115976-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7560380-B2 |
| priorityDate |
2000-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |