abstract |
An antenna-coupled microbolometer structure comprises a substrate ( 301 ), an antenna ( 102, 103 ) supported by the substrate, and a thermally sensitive element ( 101, 305 ) connected to the antenna and arranged to dissipate electric currents induced into the antenna. Both the antenna ( 102, 103 ) and the thermally sensitive element ( 101, 305 ) comprise material that is susceptible to achieving a superconductive state below a certain critical temperature. The thermally sensitive element ( 101, 305 ) is supported at a distance from the substrate ( 301 ) leaving an empty gap ( 306 ) between the thermally sensitive element ( 101, 305 ) and a surface of the substrate ( 301 ). |