| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ac41839c2abee06aead92c6400de5766 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L21-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0016 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L21-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00 |
| filingDate |
2004-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d4969aab6f62ab25b6ff3dbe09816f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e9b798532708017c67824a18d22afff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fee72aeced197a1bad39eb504677369 |
| publicationDate |
2006-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7059192-B2 |
| titleOfInvention |
Pressure sensor |
| abstract |
A pressure sensor is a micro-electro-mechanical vibrating device, with a silicon substrate ( 15; 15 ′) onto which a single-layer or multilayer vibrating assembly ( 121; 221; 321 ) is formed. It comprises an electrode ( 21; 21 ′), which makes the assembly to oscillate relative to the substrate at the resonance frequency or at another known frequency, and a detector for detecting the actual frequency and/or amplitude of said oscillation. The actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment and the variations of the frequency and amplitude with respect to the values set by the electrode is used to measure pressure variations in the surrounding environment. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9625366-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011107838-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8256298-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2309241-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006266124-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7334481-B2 |
| priorityDate |
2003-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |