| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb4ee28d43b5e8d4a3c5141fa9bcfeb0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 |
| filingDate |
1999-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ab4072e8fd99a4bcb42880c90367c59
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c9d8c6f1719e30cc979440747cea9e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93bb3599a1af33683e21b83a3f0f058c |
| publicationDate |
2006-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7052627-B1 |
| titleOfInvention |
Etching solution, etched article and method for etched article |
| abstract |
An etching solution which exhibits etching rates for both of a thermally oxidized film (THOX) and a boron-phosphorus-glass film (BPSG) of 100 Å/min or less at 25° C., and an etching rate ratio: etching rate for BPSG/etching rate for a thermally oxidized film (THOX) of 1.5 or less. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7629266-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8512587-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9394509-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10302841-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7833957-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007023396-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007207622-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9952375-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007262048-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006138399-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9989692-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7491650-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10698151-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009032766-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011117751-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006049132-A1 |
| priorityDate |
1998-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |