| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-977 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76882
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-4763
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2003-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a751bbab8400e8b278328cfdc9fca7d7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aab94886fee6acc5f9eafa8efa466b99
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee4990802de05705133e48a119c5dd6a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75f7fa50892b70f5b2225d34532116f2 |
| publicationDate |
2006-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7049223-B2 |
| titleOfInvention |
Paste including a mixture of powders, connection plug, burying method, and semiconductor device manufacturing method |
| abstract |
Form a trench in a major surface of a semiconductor substrate, then bury a paste in the trench. The paste contains solids having a conductive substance and a resin, and solvent for dissolving the resin. The solids content of the paste is not less than 60 vol % and a viscosity ratio thereof is not more than 2. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008111111-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008122040-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7968624-B2 |
| priorityDate |
1998-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |