| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02351
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-40 |
| filingDate |
2004-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d95a0836f45847d80b1b7929e79736a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da6decb32287fd8923ab789a40a54d4e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac39a9ed9445698ef1e27b1416e30104
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a02d3cd261229eff2d6acc643208a2fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d5e3874c60839c72f8f6620096ea815 |
| publicationDate |
2006-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7034399-B2 |
| titleOfInvention |
Forming a porous dielectric layer |
| abstract |
A dielectric layer is made porous by treating the dielectric material after metal interconnects are formed in or through that layer. The porosity lowers the dielectric constant of the dielectric material. The dielectric material may be subjected to an electron beam or a sonication bath to create the pores. The structure has smooth sidewalls for metal interconnects extending through the dielectric layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009212421-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8154121-B2 |
| priorityDate |
2003-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |