http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7033732-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F216-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F230-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G79-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F230-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F216-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-76 |
| filingDate | 2004-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60ea28a01d4e427f5610acd2c434d8f1 |
| publicationDate | 2006-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7033732-B2 |
| titleOfInvention | Method of preparing anti-reflective coating polymer and anti-reflecting coating composition comprising an anti-reflecting coating polymer |
| abstract | Disclosed are an organic anti-reflective coating polymer having a structure represented by the following formula I which is introduced to the top portion of photoresist, its preparation method and an anti-reflective coating composition, in a process for forming ultra-fine patterns of photoresist for photolithography by using 193 nm ArF or 157 nm VUV light source. More particularly, the present invention provides an organic anti-reflective coating polymer capable of protecting a photoresist from amine to improve the stability of a post exposure delay and to minimize pattern distortion caused by a swing phenomenon during a patterning process, its preparation method and an anti-reflective coating composition comprising the same. [formula I] n wherein each of m and n is an integer ranging from 5 to 5,000. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7948096-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006189172-A1 |
| priorityDate | 2003-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 60.