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publicationDate 2006-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7022458-B2
titleOfInvention Photoresist polymer and photoresist composition containing the same
abstract Photoresist polymers and photoresist compositions are disclosed. A photoresist polymer represented by Formula 1 and a photoresist composition containing the same have excellent etching resistance, thermal resistance and adhesive property, and high affinity to an developing solution, thereby improving LER (line edge roughness). n wherein X 1 , X 2 , X 3 , R 1 , R 2 , R 3 , R 4 , R 5 , m, n, o, a, b, c, d and e are as defined in the description.
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