| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a34d7d2e0d09a58cb7bf4a04c81162e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-0008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-06 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
2001-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c5ee00fc93e7a86d5f75be0169452f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da7e3ab7772fb874cfbebbfafbc524ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa2db480cfaea3b1cba6feb4b00dc379
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fa9da6edc4a14bfaecaf16a8d590c80 |
| publicationDate |
2006-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7012125-B2 |
| titleOfInvention |
Spin-on-glass anti-reflective coatings for photolithography |
| abstract |
Anti-reflective coating materials for deep ultraviolet photolithography include one or more organic dyes incorporated into spin-on-glass materials. Suitable dyes are strongly absorbing over wavelength ranges around wavelengths such as 248 nm and 193 nm that may be used in photolithography. A method of making dyed spin-on-glass materials includes combining one or more organic dyes with alkoxysilane reactants during synthesis of the spin-on-glass materials. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8357616-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8809482-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8784985-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8901268-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8864898-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011003480-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011003249-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8992806-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8304161-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009236310-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8642246-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8318258-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011171447-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8557877-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010279025-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005171277-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8053159-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9023433-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011236835-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8241707-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10544329-B2 |
| priorityDate |
1999-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |