| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81cfb88d909c75104c0c8d61799a72b0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T483-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-0007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-025 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-3504
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-0014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-35 |
| filingDate |
2003-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_728c77721e1a707b77c4cce75dbe14b9 |
| publicationDate |
2006-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7011614-B2 |
| titleOfInvention |
Infrared thermopile detector system for semiconductor process monitoring and control |
| abstract |
A thermopile-based detector for monitoring and/or controlling semiconductor processes, and a method of monitoring and/or controlling semiconductor processes using thermopile-based sensing of conditions in and/or affecting such processes. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006217896-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9666435-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7726876-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102013111790-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004113080-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007200065-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7351976-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006263916-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9340878-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008213925-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8244482-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7711496-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008006775-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7172918-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7723685-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009039266-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7373257-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10895010-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7925450-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010224264-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010217415-A1 |
| priorityDate |
2002-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |