| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_43e9bc481473b7735d51aacc3e34fbba |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-128 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0385
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0751
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-085 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate |
2004-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f7f538f8da73b1788ed228c2ca98f34 |
| publicationDate |
2006-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7005233-B2 |
| titleOfInvention |
Photoresist formulation for high aspect ratio plating |
| abstract |
SU-8 photoresist compositions are modified to improve their adhesion properties by adding 1% to 6% of an adhesion promoter selected from the group consisting of glycidoxypropanetrimethoxysilane, mercaptopropyltrimethoxysilane, and aminopropyltrimethoxysilane. SU-8 photoresist compositions are modified to improve their resistance to cracking and film stress by adding 0.5% to 3% of a plasticizer selected from the group consisting of dialkylphthalates, dialkylmalonates, dialkylsebacates, dialkyladipates, and diglycidyl hexahydrophthalates. The improvements can be obtained simultaneously by adding both the adhesion promoter and the plasticizer to SU-8 photoresist compositions. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7563559-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7528618-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008231686-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007248896-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007259456-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006141394-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7238464-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008124690-A1 |
| priorityDate |
2001-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |