| abstract |
A sulfonate of the formula (I): n nwherein Q 1 , Q 2 , Q 3 , Q 4 and Q 5 each independently represents a certain substituent, and A + represents a counter ion,n nwith the proviso that at least one of Q 1 , Q 2 , Q 3 , Q 4 and Q 5 is a group of the formula (II) n nwherein R 1 and R 2 each independently an alkyl having 1 to 12 carbon atoms or the like; andn na chemical amplification type positive resist composition comprising the sulfate of the formula (I) andn na resin which contains a structural unit having an acid labile group and which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid. |