| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_26cbbcbd69022b49afb42387208d7594 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L35-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate |
2001-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_824ec674e0c0f0f715747cf92b43cdd9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1f3fb7dd567709a3752d47795f7b062 |
| publicationDate |
2006-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6998636-B2 |
| titleOfInvention |
Materials having low dielectric constants and method of making |
| abstract |
The invention relates to a material including carbon, oxygen, silicon and hydrogen and having a dielectric constant of from about 2.1 to about 3.0 where an FTIR scan of the material includes at least two major peaks signifying Si—CH 3 bonding. The invention further relates to a material which has a variable dielectric constant through the thickness of the material. Another aspect of the invention is the method of making the material. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7349196-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005037153-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006285273-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004253378-A1 |
| priorityDate |
2000-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |