patent/US-6985051-B2

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6985051-B2

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filingDate	2003-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2006-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_801ffac428eff9bfecd57981b51c46c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a26b31f15decd557ad8e33e90d7930eb
publicationDate	2006-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-6985051-B2
titleOfInvention	Micromechanical resonator device and method of making a micromechanical device
abstract	A micromechanical resonator device and a method of making the micromechanical resonator device, as well as other extensional mode devices are provided wherein anchor losses are minimized by anchoring at one or more side nodal points of the resonator device. Lower damping forces are experienced by the resonator device when operated in air.
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Total number of triples: 171.