| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
2002-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b130af3780eeed49f06aca2e15f4968
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44085b801ad8953a3a6034d2ef9d497c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60ea28a01d4e427f5610acd2c434d8f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1617d7aa342ecc5ba061fc5e58128d8a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b9fac02403454d2db150938beddd852
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec72e12d4077c325ad02dc88ccb08bb3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b139cf7c37672058e5010b65e378604d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bb4663858197210557667cabff73174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6372fa27afd64ea6ea67ac236cb86c1 |
| publicationDate |
2006-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6984482-B2 |
| titleOfInvention |
Top-coating composition for photoresist and process for forming fine pattern using the same |
| abstract |
The present invention provides an over-coating composition comprising a basic compound for coating a photoresist composition to provide a vertical photoresist pattern. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007280524-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006127821-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007172757-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010151383-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7807328-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8741538-B2 |
| priorityDate |
1999-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |