| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23H5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H5-08 |
| filingDate |
2004-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b23fd7a7860a7797279de6e0e4a96d3a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e94ffa6073d3a28599d3806928d97372
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46feee75ec2a15fc3cb4aa72b0d42df6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57370adea0210bace6100ba48ef43d1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3812b701d883ae8a20d95d110caf0394
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b34bf0b224882ab1f3f3303a465896b9 |
| publicationDate |
2005-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6977036-B2 |
| titleOfInvention |
Method and apparatus for substrate polishing |
| abstract |
A method and apparatus are provided for polishing a substrate surface. In one aspect, an apparatus for polishing a substrate includes a conductive polishing pad and an electrode having a membrane disposed therebetween. The membrane is orientated relative the conductive pad in a manner that facilitates removal of entrained gas from electrolyte flowing towards the conductive pad. The apparatus may be part of an electro-chemical polishing station that may optionally be part of a system that includes chemical mechanical polishing stations. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007221495-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11705354-B2 |
| priorityDate |
2002-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |