| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a6c760472ee4c29e9cd26152ace2eb0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-8836 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L45-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate |
2004-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca3cea4b606983fc77a3daee781c7b30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_999c7b768b0de454f7826b7095ccdb85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca5a5ec2a4811b098bdf2bbbd4570f9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52ca99dc677633d568cc23e46a3ddb32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c173beab7da4ee3a76d53501fd4466b2 |
| publicationDate |
2005-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6972239-B1 |
| titleOfInvention |
Low temperature MOCVD processes for fabrication of PrXCa1-xMnO3 thin films |
| abstract |
A method of fabricating a PCMO thin film at low temperature for use in a RRAM device includes preparing a PCMO precursor; preparing a substrate; placing the substrate into a MOCVD chamber; introducing the PCMO precursor into the MOCVD chamber to deposit a PCMO thin film on the substrate; maintaining a MOCVD vaporizer at between about 240° C. to 280° C. and maintaining the MOCVD chamber at a temperature of between about 300° C. to 400° C.; removing the PCMO thin-film bearing substrate from the MOCVD chamber; and completing the RRAM device. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8367513-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8395199-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7029982-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8308915-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8454810-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7402456-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006088974-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7932548-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005239262-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007238246-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017352604-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10109549-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7407858-B2 |
| priorityDate |
2004-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |