| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-096
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-095 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-0547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-105 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-50 |
| filingDate |
2004-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca748b765b6b40d4dc56f533529485be
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5efb701a1b6f5fc0c726b8a56f0e834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_660bf6eeb7ba4cf379a9f12b529e85b2 |
| publicationDate |
2005-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6943419-B2 |
| titleOfInvention |
Hermetically packaging a microelectromechanical switch and a film bulk acoustic resonator |
| abstract |
A film bulk acoustic resonator wafer and microelectromechanical switch wafer may be combined together in face-to-face abutment with sealing material between the wafers to define individual modules. Electrical interconnects can be made between the switch and the film bulk acoustic resonator within a hermetically sealed chamber defined between the switch and the film bulk acoustic resonator. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011095656-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006290445-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7521807-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7763488-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007000976-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007096330-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7339446-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010052473-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7243833-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7358615-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004251793-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007278601-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9265428-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007077747-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7102268-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8896324-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018004690-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8203190-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8154170-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9078563-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8629601-B2 |
| priorityDate |
2002-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |